Invar 36 Vacuum-Pump Rotors for Semiconductor Equipment
Low-Expansion Invar 36 Precision Castings for Dimensional Stability | Semiconductor
Invar 36 low-expansion vacuum-pump rotors and spindle sleeves held tight tolerances under thermal cycling for semiconductor and precision equipment.
Challenge
Semiconductor and precision-equipment builders required components with very low thermal expansion and dimensional stability under repeated thermal cycling.
Solution
KING CASTING cast Invar 36 and low-thermal-expansion components β vacuum-pump rotors and spindle sleeves β with controlled metallurgy and precision machining to demanding tolerances.
Result
The parts maintained dimensional stability across temperature swings, supporting the accuracy and uptime that precision and semiconductor equipment depend on.